MKS GBR1B24CR1 20000 sccm/20 slm GBROR Mass Flow Verifier, ASM 54-123388A15
MKS GBR1B24CR1 20000 sccm/20 slm GBROR In-Situ Mass Flow Verifier, ASM 54-123388A15 Comes with what you see in the pictures. If you don’t see it, you probably wont get it. Specifications are from ASM and may vary slightly due to upgrades, options, or revisions this unit may or may not have. This is from ASM stock. I am not sure if it is used or not. ASM Information: Part Number: 54-123388A15 MKS Information: Model Number: GBR1B24CR1 Range: 20000 SCCM CE Marked: Yes Part Number Breakdown: Flow Range: 100 sccm to 20,000 sccm Fittings: Inlet: 1/4″ male VCR Outlet: 1/2″ female VCR Gas Stick Enclosure: No Description: MKS’ GBROR In Situ Flow Verifier improves product throughput by allowing accurate and timely diagnosis with verification of MFC performance during process “down” situations, or during routine tool maintenance activity. Processes that benefit from the use of the GBROR include CVD, Etch, and other processes that require tight control of critical gas flow rates in the range of 2 sccm to 50 slm. Compared with an “in the chamber” rate-of-rise, which often shows large variations due to uncontrolled temperature and surface conditions, the GBROR Gas Box Rate-Of-Rise In Situ Flow Verifier is a dedicated instrument providing a high level of confidence and reproducibility. Other advantages include independence of gas type, insensitivity of contaminiation, and flexibility of installation. Specifications: Range: 100 sccm to 20 slm Measurement Accuracy: ±< 1% of Rdg. Time to Verify (Typical): < 1 min. Power Input: 115/230 VAC, 50/60 Hz I/O Connections: Transducer (Female): 15-pin Type "D" Solenoid (Female): 37-pin Type "D" RS232 – Communications (Male): 9-pin Type "D" Dimensions: Electronic Controller: 9.0" L x 9.45" W x 3.47" H (228.6 mm x 240 mm x 88.1 mm) Mechanical Assembly: See Dimensional Drawings Wetted Materials: Inconel, 316L S.S., Kel-FR, Elgiloy Surface Finish (Internal): 10 µ inch Ra electropolish Fittings: Inlet: 1/4" male VCR Outlet: 1/2" female VCR Operating Air Pressure: 80 to 100 psig Operating Temperature: Controller: 15°C to 40°C Gas Stick: 0°C to 50°C Leak Integrity: 4 x 10-9 atm-cc/sec Mounting Options: Four mounting holes located on the base plate Compliance: Fully CE compliant to EMC Directive 2004/108/EC (when used with an overall metal braided shielded cable, properly grounded at both ends) Fully compliant to Low Voltage Directive 72/23/EEC For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $25.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? 07/07/15