BROOKS SLA5850S DELTA II MASS FLOW N2 SLA5850S1BAB6BA1A
Process Fluid / Gas Nitrogen (N2). Full Scale Flow Rate 4 SLPM (Standard Liters Per Minute). Series SLA5800 Series / EL Series. Valve Type Normally Closed Coplaner Valve. Reference Temp/Pressure 70 °F / 760 mmHg.