NEW Horiba-STEC SEC-Z513MGX N2 3 SLM Mass Flow Controller/MFC Novellus 1011242
Novellus/Gasonics Part Number: 1011242. Flow Rate: 3 SLM. Specifications are from the unit and may vary slightly due to upgrades, options, or revisions this unit may or may not have. HGS Number: 2262 5974.