NEW Horiba-STEC SEC-Z513MGX N2 3 SLM Mass Flow Controller/MFC Novellus 1011242

NEW Horiba-STEC SEC-Z513MGX N2 3 SLM Mass Flow Controller/MFC Novellus 1011242

USD 599.99 USD
SKU: 3TbPh4jg
Brand: Horiba STEC
MPN: 1011242
Condition: New – Open box

Specifications

BrandHoriba STEC
Maximum Flow Rate3000 SCCM (3 SLM)
ModelSEC-513MGX
MPN1011242

Novellus/Gasonics Part Number: 1011242. Flow Rate: 3 SLM. Specifications are from the unit and may vary slightly due to upgrades, options, or revisions this unit may or may not have. HGS Number: 2262 5974.

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